Please use this identifier to cite or link to this item:
https://hdl.handle.net/2440/58454
Citations | ||
Scopus | Web of ScienceĀ® | Altmetric |
---|---|---|
?
|
?
|
Type: | Book chapter |
Title: | Wireless interrogation of a micropump and analysis of corrugated micro-diaphragms |
Author: | Dissanayake, D. Al-Sarawi, S. Abbott, D. |
Citation: | Recent advances in sensing technology, 2009 / Kyamakya, K., Halang, W., Unger, H., Chedjou, J., Rulkov, N., Li, Z. (ed./s), vol.49 LNEE, pp.241-256 |
Publisher: | Springer |
Publisher Place: | Germany |
Issue Date: | 2009 |
Series/Report no.: | Lecture Notes in Electrical Engineering ; v. 49 |
ISBN: | 9783642005770 |
Editor: | Kyamakya, K. Halang, W. Unger, H. Chedjou, J. Rulkov, N. Li, Z. |
Statement of Responsibility: | Don W. Dissanayake, Said F. Al-Sarawi and Derek Abbott |
Abstract: | In this chapter, Surface Acoustic Wave (SAW) device based wirelessly operated, batteryless and low-powered microdiaphragm structure is investigated. These diaphragms are intended to establish the actuation mechanism for micropumps and similar flow control devices. The actuation method of the diaphragm relies on the electrostatic coupling between the diaphragm and the output Inter Digital Transducer (IDT) of the SAW device. The theory governing the SAW device based novel actuation mechanism is elaborated. A Finite Element Model (FEM) is developed and analysed using ANSYS tools. Different design methods are considered to enhance the deflection of the diaphragm for a low control voltage. As such, inclusion of different types of corrugations, and selection of different bio-compatible materials for various sections of the diaphragm are analysed. Deflection of the diaphragm is obtained as a function of the electric potential at the output IDT of the SAW device and compared with results obtained from published research. Corrugation types such as pure sinusoidal, arc sinusoidal and toroidal types are included in the analysis. Effective meshing requirements that are specific to the presented model are considered and a mesh is developed to achieve converged results. Results show that the use of corrugations around a square-shaped diaphragm with carefully chosen materials results in better performance than that of a flat diaphragm. |
Keywords: | MEMS SAW device Wireless Electrostatic Diaphragm ANSYS FEA |
Rights: | (c) Springer-Verlag Berlin Heidelberg 2009 |
DOI: | 10.1007/978-3-642-00578-7_14 |
Published version: | http://dx.doi.org/10.1007/978-3-642-00578-7_14 |
Appears in Collections: | Aurora harvest Electrical and Electronic Engineering publications |
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.