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|Title:||Characterization of the complex permittivity of thin films using a slow-wave coplanar strips resonator|
|Author:||Karami Horestani, A.|
|Citation:||Proceedings of the 37th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2012.|
|Series/Report no.:||International Conference on Infrared Millimeter and Terahertz Waves|
|Conference Name:||International Conference on Infrared, Millimeter and Terahertz Waves (37th : 2012 : Wollongong, Australia)|
|Ali K. Horestani, Christophe Fumeaux, Said Al-Sarawi and Derek Abbott|
|Abstract:||This paper proposes a characterization method for the electromagnetic properties of thin films, based on the resonance properties of a slow-wave coplanar strips resonator. It is shown that using the resonant frequency and the quality factor of the resonator, permittivity and loss tangent of an unknown thin film at high frequencies such as mm-wave frequencies can be accurately determined. The method is validated by characterizing a silicon dioxide layer in an standard CMOS process as the thin film under test.|
|Appears in Collections:||Electrical and Electronic Engineering publications|
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