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Electrically actuated MEMS resonators: effects of fringing field and viscoelasticity | 63 |
Electrically actuated MEMS resonators: effects of fringing field and viscoelasticity | 6 |
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Electrically actuated MEMS resonators: effects of fringing field and viscoelasticity | 6 | 2 | 0 | 0 | 5 | 1 | 11 |
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